3 keV Raster Ion Gun with Novel Gas Injection System
- Inert Gas Operation, Standard
- Reactive Gas Operation, Option
- Sputtering at approximately 10-6T
- Outstanding Low Voltage Performance
- Trap for Impurities
- Beam Diameter 2.5mm
- Dual Filament Line Off Sight
- Automatic Degass Function
- 2.75" O.D. Mounting
981-2046 Controller
981-2043-I Gun
Connection Cable 6m, Gasket, Manual