VARIAN Products

3 keV Raster Ion Gun with Novel Gas Injection System

  • Inert Gas Operation, Standard
  • Reactive Gas Operation, Option
  • Sputtering at approximately 10-6T
  • Outstanding Low Voltage Performance
  • Trap for Impurities
  • Beam Diameter 2.5mm
  • Dual Filament Line Off Sight
  • Automatic Degass Function
  • 2.75" O.D. Mounting
3keV Raster Ion Ion Gun with Novel Gas Injection System
Incl.
981-2046 Controller
981-2043-1 Gun
Connection Cable 6m, Gasket, Manual

USD 9 860
EUR 7 420


Accessories and SparesUSDEUR
981-2046Power Supply, 115 V / 230 V4 8803 660
981-2043-IIon Gun w/Gas Inlet Flange4 9803 760
980-2000Leakvalve, 1.33" / 1.33"1 120920
980-1012Argon Gas Bottle (refill)280210
981-2045Yt-Iridium Filament, Option360270

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