VARIAN Products

3 keV Raster Ion Bombardment Gun and Control

  • Outstanding Low Voltage performance
  • High sputtering rates 200 a/min
  • Beam diameter 2.5 mm
  • Dual Filament Line Off Sight
  • Automatic Degass Function
  • 2.75" O.D. Mounting
 3keV Raster Ion Bombardment Gun
Incl.
Model 981-2043 Gun w/Dual Filament
Model 981-2046 Controller, 115V/230V
Cable Kit, Gasket, Manual

USD 7690

User Guide - Open or Download

Accessories & Spares

Part NumberDescriptionUSD
981-2040Ion Gun Shipping Container100
981-2046Power Supply, 115V/230V4250
981-2043Ion Gun, 6" Length3460
981-2043-EXTIon Gun, Custom Insertion Length4850
981-2046-BVUgrade with Beam Voltage Indicator450
00.660.1156m Connection Cable630
981-2044Replacement Filament, incl. Two Pairs320
981-2044-EXCRefurbished Filament, One Pair
(Exchange Service - Yours has to be returned)		100
81.400.344Manual, Gun50
81.400.345Manual, Controller50
81.400.346Set of Schematics, Layouts, Parts Lists50
00.652.396Beam Path Grid (Gridded Washer)80
00.652.396-EXCRefurbished Beam Path Grid (Gridded Washer)
(Exchange Service - Yours has to be returned)		40
00.648.324Extractor Grid Assembly240
00.648.324-EXCRefurbished Extractor Grid Assembly
(Exchange Service - Yours has to be returned)		120
53.611.003Remote, Male Cable Connector24
Loaner, Power Supply Rent per week90
RMA# xxxxRepair of Power Supply, Flat Rate420
RMA# xxxxRepair of Ion Gun, Flat Rate590
RMA# xxxxRepair of Connection Cable260

Back