In 1993 Eurovac was founded in Sweden to establish a Sales & Service Organization for the Perkin-Elmer, Surface Science Instrumentation (PHI). In addition Eurovac offers UHV-Hardware from Thermionics, USA.

With above combination Eurovac designed and installed Custom Vacuum Systems for Thin Film Deposition, Material Science, R & D, Particle Accelerators, Nano and Semiconductor Labs

In 1998 Eurovac acquired the Varian Surface Science Division, Palo Alto, USA, and moved the manufacturing of Ion Guns, Electron Guns, LEED, RHEED and CMA to Stockholm, Sweden. Eurovac is key provider of spare parts, service support and manufacture of Varian Surface Science Instrumentation.

In 2023 the company moved to the region of Munich for further expansion.